OMRON EE-SPY801 / 802

Wafer-carrier Mounting Photomicrosensors

Photomicrosensors for detecting wafer-carrier mounting.

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  • The mounting position is set with a pedestal.
  • The contact surface with the wafer carrier uses a special chemicalresistant fluororesin.
  • The unique optical system enables stable detection of almost all wafer-carriers.
  • Light modulation effectively reduces external light interference.
  • Utilizes talc-free clean cables.

 

* Be sure to read Safety Precautions on page 3.

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