OMRON EE-SPY801 / 802
Wafer-carrier Mounting Photomicrosensors Photomicrosensors for detecting wafer-carrier mounting.
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Features
- The mounting position is set with a pedestal.
- The contact surface with the wafer carrier uses a special chemicalresistant fluororesin.
- The unique optical system enables stable detection of almost all wafer-carriers.
- Light modulation effectively reduces external light interference.
- Utilizes talc-free clean cables.
* Be sure to read Safety Precautions on page 3.
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